Course catalogue
Create your own master’s programme by choosing between the different specializations of our partner universities.
Master SERP+ Programme - cohort 2020-2025
Nanotechnologies, Micro and Nano-fabrication (6 ECTS)
All courses during this semester
All courses during this semester
- Transferable skills: Polish course, Summer School in Entrepreneurship (6 ECTS)
- The molecules of life: from structure to chemical function (3 ECTS)
- Selected in silico and in vitro methods in thermodynamics and soft matter (6 ECTS)
- Organic chemistry (3 ECTS)
- Introduction to solid state (6 ECTS)
- Dynamics of photochemical reactions in chemistry, biology and medicine (6 ECTS)
- Transferable skills: Portuguese course, Summer School in Entrepreneurship (6 ECTS)
- Solid State Physics (6 ECTS)
- Molecular Energetics (3 ECTS)
- Laboratory of Materials and Surface Analysis (6 ECTS)
- Interfacial Electrochemistry (3 ECTS)
- Interfaces, Colloids and Self-Assembly (6 ECTS)
- Transferable skills: Summer School in Entrepreneurship (3 ECTS)
- Organic Photochemistry (3 ECTS)
- Italian Courses (3 ECTS)
- Introduction to Solid State (6 ECTS)
- Inorganic Functional Materials (3 ECTS)
- Electrochemical systems for energy conversion and storage (6 ECTS)
- Chemistry and Technology of Catalysis and Laboratory (6 ECTS)
All courses during this semester
- Nanosciences (6 ECTS)
- Nanoparticles and Advanced radiation therapies (6 ECTS)
- Fundamentals in data science and machine learning (3 ECTS)
- Femtochemistry (3 ECTS)
- Chemistry for renewable energy: from advanced research to industrial applications (6 ECTS)
- Transferable skills: Scientific writing, Polish courses (6 ECTS)
- Lanthanide luminescence: Application in chemistry and biology (6 ECTS)
- Introduction to Data Sciences (3 ECTS)
- Environmental photochemistry (3 ECTS)
- Computational and quantum photochemistry (6 ECTS)
- Applied photochemistry and luminescence spectroscopy (6 ECTS)
- Scientific Writing and Career Objectives (3 ECTS)
- Portuguese course (3 ECTS)
- Nanotechnologies, Micro and Nano-fabrication (6 ECTS)
- Materials Properties and Applications (6 ECTS)
- Electrochemical Technology (6 ECTS)
- Data Science Basics (3 ECTS)
- Bionanotechnology (3 ECTS)
- Transferable skills: Scientific Writing Industrial Seminars (3 ECTS)
- Surface Science and Nanostructuring at Surfaces (6 ECTS)
- Polymers for electronics and energy harvesting (6 ECTS)
- Laboratory on device building (3 ECTS)
- Italian Courses (3 ECTS)
- Data Science and Applications to Chemistry (3 ECTS)
- Composite materials for biomedical applications (6 ECTS)
Content
- Introduction to Nanotechnology
- Fabrication of Nanomaterials I: Diversified characterization techniques in-situ and standard: SEM, EDS, Auger, XPS, RHEED, LEED
- Several deposition techniques: PLD, IBD, Sputtering, Thermal Evaporator, CVD, ALD.
- Fabrication of Nanomaterials II: Optical Lithography, E-beam lithography, Focused ion beam lithography, X-ray lithography, Etching techniques: wet and dry methods
- Physical Properties I: Mechanical MEMS, NEMS, Mechanical properties of micro-machined structures, Devices and applications
- Physical Properties II: : Electrical and Optical, Quantum wells/wires/dots, Size and confinement effects, Conduction electrons and dimensionality, Fermi gas and density of states (DOS), Nanoelectronics, Nanophotonics, Excitons, Single electron tunneling, Superconductivity and Applications: sensors, lasers.
Practicals
- General characteristics and specifications for cleanrooms. Operating mode and support systems. General rules of operation and safety.
- Production of thin films by sputtering, thermal evaporation, ion and electron beams, and Plasma Enhanced Chemical Vapour Deposition (PECVD).
- Microlithography: production of masks for contact lithography and laser direct writing.
- Reactive plasma (dry-etching) micromachining. Micromachining of silicon in solution (wet-etching).
- Characterization techniques: optical and profilometry.
- Wire bonding. Cutting and polishing of substrates and devices.
- Fabrication of a functional microdevice.
Aims
- Technological importance of emerging nanotechnologies.
- Relation between physical size reduction and modification of physical properties
- Physical properties of nanostructures: mechanical, electronic, optical and magnetic.
- Applications of nanomaterials and nanodevices.
- To be able to answer quantitative and qualitative questions about cleanrooms, micro and nanofabrication techniques.
- To be able to plan and execute experiments.
- To be able to perform literature searches, including critical assessment; development of correct oral and written expression.
- To be able to develop well defined mini-projects.
Further competences to be acquired
To be able to:
- apply correctly maths, science and engineering concepts
- plan and execute experiments and to perform data analysis
- develop teamwork skills
- identify, and solve problems in physics, chemistry and engineering
- identify processes and/or materials systems to achieve certain specifications
- communicate efficiently.
Recommended Books
- H. S. Nalwa (Ed.), “Nanostructured Materials and Nanotechnology”, Academic Press, 2002.
- C. P. Poole Jr. and F. J. Owens, “Introduction to Nanotechnology”, Wiley-Interscience, 2003.
- Z. Cui, “Micro-Nanofabrication: technologies and Applications”, Springer, 2005.
- K, Oura, V. G. Lifshits, A. A. Saranin, A. V. Zotov and M. Katayama, “Surface Science: An Introduction”, Springer, 2003.
- B. Bhushan (Ed.), “Handbook of Nanotechnology”, Springer, 2004.
- C. Dupas, P. Houdy and M. Lahmani, “Nanoscience”, Springer, 2004.
- Madou MJ, Fundamentals of microfabrication: the science of miniaturization, CRC Press 2002.
- Rai-Choudry P, Handbook of Microlithography, Micromachining and Microfabrication, Vol 1,2, SPIE Press 1997.
- Franssila S, Introduction to Microfabrication, 2ªedição, Wiley 2010.
Teaching Staff
Paulo Marques (responsible)
André Pereira
Hours
Theoretical-practical classes (TP): Presentation of the curriculum using multimedia; specialized topics will be presented in lectures given by guests. Finally, the basic principle of the classes will be based on a discussion between students and teachers.
Practicals: The course teaching is based on a problem solving approach. Students, based on technical knowledge acquired by reading scientific papers and technical documents provided, plan the experiment, being supported by the teacher. The teachers also support the students in the realization of experiment and in the critical analysis of the results. The teacher should also discuss with students what are the most relevant results and those that should be the subject of a more detailed analysis.
The assessment consists of four distinct components: Final Exam (50%), Continuous evaluation (5%), individual essay (25%), oral presentation of work and oral questions about micro and nanofabrication techniques (20 %).
A minimum grade of 7.0/20 in each component is mandatory.
Grading System
42 h (30h theoretical-practical + 12h practicals)